PRODUCTS
NanoBiz Korea
나노비즈코리아
Manual Sputter Coater
An easy-to-use basic sputter coater for gold coating of SEM specimens.
제품설명
Product Description
This is a easy-to-use basic instrument for gold coating of SEM specimens. It has fully variable current control, a digital process timer with pause option, a variable height specimen table, a hinged top plate and an O-ring sealed vacuum chamber.
The control allows the sputter current to be set independently of the gas pressure, which is adjusted separately by a manual leak valve. Coverage and grain size are optimised for any specimen.
The cool magnetron type head with 57mm diameter target gives efficient sputtering with minimal heating. Coating time is set by a timer with a digital readout and stored in the memory. The vacuum status and sputter current are displayed on the panel meter.
A modular desktop design combines sputter control unit, pumping system and thickness monitor into an area of only 400 x 600mm. It is fully integrated using a quick release all-metal coupling system.
The adjustable height specimen table will accept up to 12 pin type stubs or can be used as a platform for other types of stubs and specimens.
A vacuum feed through is provided for the optional film thickness
Chamber size: 120 x 120mm
Features & Specifications
Sputter head
Low voltage planar magnatron
Sputter target
Gold fitted as standard (Au/Pd or Pt optional)
Sputter supply
Microprocessor based
Sample table
Holds 12 SEM ½" stubs
Analogue metering
Vacuum, Atm - 0.001mb
Dimensions (W x D x H)
420 x 295 x 287mm
Weight
10kg
Power
40VA max (excluding rotary pump)
Pumping system speed
2.5/3.0m3/hr (50/60Hz)
Desktop system
Vacuum pump is mounted on desktop compatible anti-vibration table
Pumping system dimensions (W x D x H)
330 x 215 x 210mm (H 270mm with filter)
Pumping system weight
15kg
Pumping system power
130VA
Services required
Argon gas: purity, min. 99.9%
Technical Data
