NanoBiz Korea
NanoBiz Korea
The Allalin allows for “No Compromise” large field/fast scanning simultaneous SEM imaging with hyperspectral or panchromatic CL maps. The system was constructed from the ground up to attain the best cathodoluminescence performance without sacrificing the SEM performance: the light microscope and the objective lens of the SEM are carefully integrated so that their focal planes match each other; the light microscope is machined with sub-micrometer precision so as to an achromatic, high numerical aperture (N.A. 0.71) detection with superior photon collection efficiency over a large field of view — up to 300µm — compared with traditional CL technologies. As a result, quantitative cathodoluminescence, where instrument related artifact can intrinsically be ruled out as an explanation for a spectral feature or a contrast, becomes conceivable for the first time.
The Allalin is built for those who need to follow a tight technology roadmap and quickly access very precise spectroscopic information that has been out of reach for traditional methods.
In semiconductor Failure Analysis, Development & Research, the Allalin’s spectroscopic measurement capabilities offer an unparalleled solution for fast and reliable defect detection and localization. Proven use cases include measurement of dislocation density, material composition fluctuations, strain, dopant type and concentration; and a wide range of other applications.
In scientific research, the Allalin’s ability to create spectroscopic maps with nanometer resolution makes it the ultimate tool to acquire a deep understanding into the physics of nanoscale objects.
The Allalin features a comprehensive set of options to optimize the tool’s performance for your application : various choices of detectors to cover the UV – IR wavelength range, an stable low temperature stage, and a high sensitivity EBIC (Electron Beam Induced Current) detection solution.
Designed from the ground up as an integrated CL-SEM system
Schematic setup of an Allalin system showing the main components.
Sampleholder overview created by the user. This overview is created for every sample load and facilitates the navigation to the region of interest on any given sample. The software tracks the location in a metadata file which makes data analysis easier and removes potential sample identifications errors.
Standard screen during hyperspectral mapping. The user can choose spectral bands and control in realtime the quality of the measurement.
Layout example with Helium Dewar for low temperature operation and operator desk.