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Critcal Poindt Dryers (Cleanroom) - 임계점 건조기
tousimis Cleanroom용 CPD 제품들을 확인하시고 많은 문의 부탁드립니다.

제품설명

Applications


The Samdri® line of Supercritical Point Dryers is successfully used to increase yield and uniformity of MEMS devices. Liquid carbon dioxide is the transitional fluid used to process your delicate MEMS. The tousimis Samdri® line of Supercritical Point Drying tools used for the MEMS CO2 dry release after wet etching is a most beneficial anti-stiction tool for the MEMS fab.

Autosamdri®-934

     

Touchscreen Series C for 4" (100mm) Wafers

  • Process up to Five 4" (100mm) Wafers per Process Run
  •  Touchscreen Programmable Interface
  •  First Time Ever...Previous Run Data Review
  •  Integrated Chiller Loop Decreases LCO2 Consumption
  •  Easy Facilitation with Small Foot Print Design
tousimis catalog# 8788A

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Automegasamdri®-936

     

Touchscreen Series C for 6" (150mm) Wafers


  •  Process up to Five 6" (150mm) Wafers per Process Run
  •  Touchscreen Programmable Interface
  •  First Time Ever...Previous Run Data Review
  •  Integrated Chiller Loop Decreases LCO2 Consumption
  •  Easy Facilitation with Small Foot Print Design
tousimis catalog# 8788B

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Automegasamdri®-938

     

Touchscreen Series C for 8" (200mm) Wafers

  •  Process up to Five 8" (200mm) Wafers per Process Run
  •  Touchscreen Programmable Interface
  •  First Time Ever...Previous Run Data Review
  •  Integrated Chiller Loop Decreases LCO2 Consumption
  •  Easy Facilitation with Small Foot Print Design
tousimis catalog# 8788C

More Information →






Autosamdri®-931

     

Advanced Digital Multi-application Dryer

  •  Patent Pending "Stasis Software" for Challenging Sample Types
  •  Available in 1.25", 2.50" and 3.40" chamber sizes
  •  Winner of 2012 Microscopy Today Innovation Award
  •  Built-in Internal Condenser
  •  Delicate Slow Fill Path Through for Delicate Samples
  •  Precision process control
  •  Internal Filtration System Down to 0.08µm
  •  Optional "Quick Release" sample holder (down to 2 µm in size)
  •  Program and save custom recipes
  •  Made in U.S.A.

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  • ● Process up to 5 x 1" (25mm) wafers
  •  Automatic Supercritical Point Dryer
  •  Minimal Facility Utility Requirements
  •  Filtration down to 0.08µm
  •  Made in U.S.A.
tousimis catalog# 8779C

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  •  Process up to 5 x 4" (100mm) wafers
  •  Automatic Supercritical Point Dryer
  •  Minimal Facility Utility Requirements
  •  Filtration down to 0.08µm
  •  Made in U.S.A.
tousimis catalog# 8780C

More Information →





  •  Process up to 5 x 6" (150mm) wafers
  •  Automatic Supercritical Point Dryer
  •  Minimal Facility Utility Requirements
  •  Filtration down to 0.08µm
  •  Made in U.S.A.
tousimis catalog# 8785C

More Information →



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