PRODUCTS
NanoBiz Korea
나노비즈코리아
페이지정보 : 65 / 66
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Säntis 300/Full wafer CL SEMFull wafer cathodoluminescence microscope
The Säntis 300 system has been designed for fully automated control of 150, 200 and 300mm wafers.
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EM AccessoriesHigh Vacuuum pumping Station -
Light-Field System LF4-CUBERemoves contamination from samples and holder shafts
No re-contamination during observation
High-vacuum holder station: less than 1X10-4 Pa -
High Power Magnetic Field HolderHigh Power Magnetic Field , MAX 197mT
In-situe observation Available 45mT
Cartridge Strcture
