GV10x DS Asher
The GV10x Downstream Asher’s ability to remove carbon contamination is a major advancement over traditional methods of mitigating contamination using cold trapping, nitrogen purging, and other plasma cleaners. The GV10x, with its extended power and pressure range (5 to 100 Watts and 2 to <0.005 Torr), represents a paradigm shift in the carbon decontamination of SEMs and other vacuum systems. Atomic oxygen and hydrogen eliminates contamination by converting the surface carbon into gas phase molecules which are then pumped out of chambers.
ibss Group, Inc. offers two different controllers to power and operate GV10x plasma sources. The choice between BT Controller and 2U Controller is a laboratory user preference. The ibss GUI software is compatible with both controllers.