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agar scientific

Geller reference standard MRS-3
The MRS-3 is a universal magnification calibration standard suitable for a wide range of instrumentation. Magnifications from 10X to 50,000X. 2µm minimum pitch. Traceable to national labs for ISO9000 and ISO17025.

제품설명

Product Description


The MRS-3 is a universal magnification calibration standard suitable for a wide range of instrumentation including scanning, optical reflection and transmission, scanning probe and confocal microscopy. The patterns are anti-reflective chromium on quartz, which have been fabricated using electron beam lithography techniques. This proprietary coating virtually eliminates electron beam charging at any accelerating voltage when used in an SEM.

The geometric design of the MRS-3 contains groups of nested squares spanning several orders of magnitude with pitches of 500, 50 and 2µm. The largest pattern is 8mm square, giving a magnification measurement range from x10 to x50,000. The patterns include nested squares and rectangles for X, Y calibration that range in size from 1 to 120µm, as well as circles ranging from 2 to 100µm in diameter, ideal for checking particle size counting systems. This standard can also be used for measurements in the Z plane where the pattern height is 0.1µm ± 0.003µm, and is most useful for profilometry.

The standard is available in three versions: non-certified; certified in X and Y– NPL and NIST traceable; and certified in X, Y and Z – the Z measurement traceable to NIST only. Although the specimens can be supplied unmounted, the use of a special protective holder is recommended. The universal holder enables the standard to be used for SEM and optical applications using reflected and transmitted illumination. Alternatively it can be supplied in a precision metal slide 25 x 43mm for optical use only.

Technical Data

 MRS-3 Technical Datasheet  




 제품

제품 코드번호 

 MRS3 Geller Reference Standard Non Traceable

 AGS1990

 MRS3 Geller Reference Standard Non Traceable in SEM Retainer

AGS1990-S 

 MRS3 Geller Reference Standard Non Traceable in TEM 3mm x 0.25mm Retainer

 AGS1990-T

 MRS3 Geller Reference Standard Non Traceable (1" x 3" Glass Slide Mounting)

AGS1990-G 

 MRS3 Geller Reference Standard Non Traceable in Optical Retainer

 AGS1990-O

 MRS3 Geller Reference Standard XY Traceable

 AGS1991

 MRS3 Geller Reference Standard XY Traceable in SEM Retainer

 AGS1991-S

 MRS3 Geller Reference Standard XY Traceable in TEM 3mm x 0.25mm Retainer

 AGS1991-T

 MRS3 Geller Reference Standard XY Traceable (1" x 3" Glass Slide Mounting)

 AGS1991-G

 MRS3 Geller Reference Standard XY Traceable in Optical Retainer

 AGS1991-O

 MRS3 Geller Reference Standard XYZ Traceable

 AGS1992

 MRS3 Geller Reference Standard XYZ Traceable in SEM Retainer

 AGS1992-S

 MRS3 Geller Reference Standard XYZ Traceable in TEM 3mm x 0.25mm Retainer

AGS1992-T 

 MRS3 Geller Reference Standard XYZ Traceable (1" x 3" Glass Slide Mounting)

 AGS1992-G

 MRS3 Geller Reference Standard XYZ Traceable in Optical Retainer

 AGS1992-O

 MRS Pin ONLY for use with SEM Retainer (MRS3 & MRS4 Range)

 AGS1810P



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