PRODUCTS
NanoBiz Korea
- > Cleanroom Material Fabricated Static Free Design
- > Bright LCD Touchscreen Control
- > Default "Automode" setting suitable for most wafer and die MEMS applications
- > Process up to 5 substrates per process run (either Wafers or Die)
- > HF Compatible Holder(s) included with system (see Chamber Size Options below)
- > Create and save custom Recipes exactly for your specific sample needs
- > Easy View Placement of Micro Metering Valves with Vernier Handles
- > Slow Fill feature protects the most delicate samples
- > Fast adiabatic chamber cooling (Less than one minute for the 1.25" chamber)
- > Maintenance Free Non-Mechanical Vortex Swirl™ Purge Stirring
- > External 0.5µm Post-Purge filter access for easy preventive maintenance
- > External LCO2 tank supply particulate filtration using 'Double T-Filter' design with 99.5%+ retention
- > Internal filtration delivers filtered LCO2 down to 0.08µm with 99.999+% retention directly into process chamber
- > Internal SOTER™ Condenser quietly separates waste alcohol and CO2 while eliminating any freeze up or static discharge
- > EZ top loading process chamber with LED illumination
- > "Stasis Software" for drying GELS and other challenging sample types
- > Post Process Previous Run Data Review
- > All components meet CE, UL and/or U.S. Military specifications
- > 2 year warranty on all parts and labor
- > Made in U.S.A.
SPECIFICATIONS
- > Cabinet: (W) 15.0" (38.0cm) x (H) 13.25" (33.5cm) x (D) 20" (50.8cm)
- > System Set-Up Area Required: (W) 24" (61cm) x (D) 22" (56cm)
- > Chamber Size (Available in three sizes):
- • 1.25" ID x 1.25" Depth (31.75mm ID x 31.75mm Depth) - 25 ml Volume
- • 2.50" ID x 1.25" Depth (63.50mm ID x 31.75mm Depth) - 100 ml Volume
- • 3.40" ID x 1.25" Depth (86.36mm ID x 31.75mm Depth) - 186 ml Volume
- > Pressure Gauge Range: 0- 2000 psi, Temperature Range - 30°C to 60°C
- > 120V or 220V Models Available
STANDARD ACCESSORIES
- > Flexible High-Pressure LCO2 Supply Hose, 10ft (3.0m)
> Note: Other lengths available upon request up to 50ft (15m) - > HF Compatible Substrate Holders included (see Chamber Size Options below)
- > Chamber insert included for 2.50" chamber and 3.40" chamber to reduce the chamber size down to 1.25"
- > Double T-Filter Assembly (#8785) pre-installed onto the LCO2 high-pressure hose. LCO2 filtered twice thru 0.5µm filters prior to LCO2 entering Autoamdri®-931 process chamber
- > Static Free Exhaust Tubing
- > Flow Meter supplied allows precise BLEED Exhaust Calibration
- > Spare chamber O-rings (2), LED chamber lamp (1), and 5A slo-blow fuses (2)
- > User Manual and Check-Out Data Sheet
- > Installation Tool Kit
- > Free lifetime technical support
OPTIONAL ACCESSORIES
For all Autosamdri®-931
- > 8760-40: 5 AMP FUSE for SAMDRI® and Autosamdri®
- > 8770-13: LED CHAMBER LAMP for SAMDRI® and Autosamdri® (120V/60Hz)
- > 8770-33: HIGH-PRESSURE HOSE, 10ft
- > 8770-HPS: HIGH-PRESSURE HOSE - Custom lengths available upon request
- > 8785: Double T-Filter Assembly
- > 8784-05: Gasket for LCO2 Tank Connect
- > 8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter
- > 8770-53: POWER CABLE
- > 8770-54: LCO2 TANK SCALE W/ REMOTE READOUT
- > 8770-94: Carboy, 1 gal capacity with 2 quick connect 1/4" hose barbs
- > 8770-95: Carboy, 2.5 gal capacity with 2 quick connect 1/4" hose barbs
- > 8770-51/T: Teflon® O-Ring for 1.25" Chamber I.D. for Autosamdri®-931 (Cleanroom version)
- > 8770-45: Flow Meter - Use with any 1.25" dia. Samdri® Chamber (20 SCFH)
- > 8770-51/S25T: Teflon® O-Ring for Autosamdri®-931 with 2.50" I.D. Chamber (Cleanroom version)
- > 8770-51/S25T-BR: Backing Ring for 2.50" Chamber I.D.
- > 8770-46: Flow Meter - Use with any 2.50", 3.40" and 4.0" dia. Autosamdri® Chamber (60 SCFH)
- > 8770-51/S34T: Teflon® O-Ring for 3.40" Chamber I.D.
- > 8770-51/S34T-BR: Backing Ring for 3.40" Chamber I.D.
- > 8770-46: Flow Meter - Use with any 2.50", 3.40" and 4.0" dia. Autosamdri® Chamber (60 SCFH)
CPD MULTI-APPLICATIONS
- > Bio-Engineering
- > Botanical
- > Entomology
- > Gel
- > Graphene
- > MEMS
- > Metal-Organic Frameworks
- > Miscellaneous SEM CPD Apps
- > Nanoscribe
Chamber Size Options
- Brochure Download
- Chamber Size
- Chamber Volume
- Chamber Insert to reduce the chamber size down to 1.25" I.D.
- Average LCO2 Consumption
(10 minutes PURGE Time) - 10mm Square HF Compatible Chip Holder
- 2"(50mm) HF Compatible Wafer Holder
- 3"(75mm) HF Compatible Wafer Holder
3.40" Chamber
Cat.# 8787F
3.40" ID x 1.25" Depth
86.36mm ID x 31.75mm Depth186 ml Included
3.5-5.0 LB
(1.5-2.5 Kg)
IncludedIncluded Included
2.50" Chamber
Cat.# 8787E
2.50" ID x 1.25" Depth
63.50mm ID x 31.75mm Depth100 ml Included
2.0-3.0 LB
(0.9-1.5 Kg)
IncludedIncluded X
1.25" Chamber
Cat.# 8787D
Download Brochure (PDF) 1.25" ID x 1.25" Depth
31.75mm ID x 31.75mm Depth25 ml X
1.5-2.0 LB
(0.6-1.0 Kg)
IncludedX X
Autosamdri®-931 - 1.25" Chamber
1.25" Chamber Size
1.25" Chamber with a 10mm Square HF Compatible Chip Holder
Autosamdri®-931 - 2.50" Chamber
2.50" Chamber Size
2.50" Chamber with a 2" (50mm) HF Compatible Wafer Holder
2.50" Chamber with a Chamber Insert
2.50" Chamber with a Chamber Insert and a 10mm Square HF Compatible Chip Holder
Autosamdri®-931 - 3.40" Chamber
3.40" Chamber with a 1" (25mm) HF Compatible Wafer Holder and a 10mm Square HF Compatible Chip Holder
3.40" Chamber with a 2" (50mm) HF Compatible Wafer Holder
3.40" Chamber with a 10mm Square HF Compatible Chip Holder
3.40" Chamber with a chamber insert
