PRODUCTS
NanoBiz Korea
나노비즈코리아
tousimis
Autosamdri®-815, Series B
tousimis
The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" (25mm) wafers.
The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" (25mm) wafers.
제품설명
• Process up to 1" (25mm) wafers
• Automatic Supercritical Point Dryer
• Minimal Facility Utility Requirements
• Made in U.S.A.
tousimis catalog# 8779C
FEATURES
> Microprocessor* controller allows for complete automatic processing.
> Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
> Internal surfaces inert to CO2, ultra pure alcohols and acetone.
> Repeatable operating parameters insuring reproducibility of results.
> Process up to 5 x 10mm square die or 5 x 1" (25mm) diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders* are used to transport and process your MEMS devices minimizing handling).
> Integrated temperature controls.*
> Internal rupture disc built in for safety.
> LED's instantly indicate process mode at a glance.*
> Clean room static-free compatible design.
> Complete advanced solid state reliable electronics.
> Efficient adiabatic cooling system*; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
> All electronic components meet CE, UL and/or U.S. Military Specifications.
> Static pressure control module pre-set for automatic safe pressure stability.
> 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
> Under-lit chamber with viewing window facilitates operator chamber status viewing.
> Vernier Handle Meter Valves allow for repeatable precision flow control.
> SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).
SPECIFICATIONS
> Cabinet: 14.0" (35.6cm) Width x 10.25" (26.0cm) Height x 21.5" (54.6cm) Length
> System Set-Up Area Required: 36" (92cm) Width x 30" (76cm) Depth
> Chamber size: 1.25" I.D. x 1.25" Depth, Chamber volume: 25 ml
> Temperature gauge range: -30°C to 60°C
> Pressure gauge range: 0 to 2,000 psi
> Purge Timer Range: 0 - 45 minutes
> 120V/50-60Hz (Other voltage units also available. Please Inquire)
STANDARD ACCESSORIES
> LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
> Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Autosamdri®-815.
> SOTER™ Condenser* connects to Autosamdri®-815, Series B. Captures all alcohol and deadens exhaust noise.
> Static free Exhaust Tubing for all exhaust outlets.
> Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
> 20 SCFH Flow Meter enables periodic BLEED rate measurement for exact pressure decompression.
> Spare Chamber O-ring (2), Chamber Lamp (1), and 5A Slo-Blow Fuses (2).
> 10mm Square HF Compatible Chip Holder* included. This holder can load up to 5 die per process run.
> Installation Tool Kit included.
> Free lifetime technical support consultation by our scientific staff.
> 2 year warranty on all parts and labor.
OPTIONAL ACCESSORIES
> 8777: SOTER™ CONDENSER
> 8760-01: KNURL NUT for 1.25" Process Chamber
> 8760-40: 5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
> 8770-10: CHAMBER LAMP, 120Volt/60Hz
> 8770-32: HIGH-PRESSURE HOSE, 5ft
> 8770-33: HIGH-PRESSURE HOSE, 10ft
> 8770-50: CHAMBER LID, for any tousimis SAMDRI® with a 1.25" diameter chambers
> 8785: Double T-Filter Assembly
> 8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
> 8784-05: Gasket for LCO2 Tank Connect
> 8770-51/T: Teflon® O-Ring for 1.25" Chamber I.D.
> 8770-45: Flow Meter - Use with any 1.25" dia. Samdri® Chamber (20 SCFH)
> 8770-53: POWER CABLE
> 8770-54: LCO2 TANK SCALE W/ REMOTE DISPLAY
> 8770-56: Step-Down Transformer, 200-240V → 110-120V, 1000W
> 8770-83A: Internal 0.5µm 316SS Particulate Line Filter
> 8768G: 1" - 25mm HF Compatible Wafer Holder Holds 5 Wafers
> 8768E: 10mm Square HF Compatible Chip Holder, Holds 5 Die
