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tousimis
Autosamdri®-815B, Series B
tousimis
The Supercritical Autosamdri®-815B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Autosamdri®-815B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 4" (100mm), 3" (75mm), 2" (50mm) wafers or 10mm square die per process run!
The Supercritical Autosamdri®-815B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Autosamdri®-815B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 4" (100mm), 3" (75mm), 2" (50mm) wafers or 10mm square die per process run!
제품설명
• Process up to 4" (100mm) wafers
• Automatic Supercritical Point Dryer
• Minimal Facility Utility Requirements
• Made in U.S.A.
tousimis catalog# 8780C
FEATURES
> Microprocessor controller allows for complete automatic processing.*
> All internal surfaces are inert to CO2 and ultra pure alcohols.*
> Repeatable operating parameters insuring reproducibility of results.*
> Integrated temperature controls.*
> Internal rupture disc built in for safety. *
> Processes up to 5 x 4" (100mm) diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 3" (75mm), 5 x 2" (50mm) diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
> All electronic components meet CE, UL and/or U.S. Military Specifications.
> Static pressure control module pre-set for automatic safe pressure stability.
> 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
> Under-lit chamber with viewing window facilitates operator chamber status viewing.
> An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes and maintains temperature automatically during both FILL and PURGE modes.*
> LED's instantly indicate process mode at a glance.*
> Clean room static-free compatible design.
> For added safety and convenience, the U.S. Patented SOTER™ condenser* quietly captures exhaust and alcohols.
> Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.
SPECIFICATIONS
> Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
> System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth
> Chamber size: 4.50" I.D. x 1.25" depth Chamber volume: 326 ml
> Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
> 120V/50-60Hz (Other voltage units also available. Please Inquire)
> LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*
STANDARD ACCESSORIES
> LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~ 3m) long for clean room operation (at a nominal charge, other lengths available upon request).
> Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Autosamdri®-815B.
> New SOTER™ Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*
> Static free Exhaust Tubing for all exhaust outlets.
> Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
> Spare Chamber O-ring (3), Chamber Lamp (1), and 5A Slo-Blow Fuses (2).
> 3 Chamber Inserts.* Enables original chamber ID reduction down to smaller chamber ID sizes for a range including: 4", 3", 2", and 1.25" !
> 4" (100mm), 3" (75mm), 2" (50mm) diameter Wafer Holders and 10mm square Die Holder included. Holders are HF compatible and can hold up to 5 wafers or die each.
> Free lifetime technical support consultation by our scientific staff.
> 2 year warranty on all parts and labor.
OPTIONAL ACCESSORIES
> 8760-02: KNURL NUT for 4" and 6" Process Chamber
> 8760-40: 5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
> 8770-10: CHAMBER LAMP, 120Volt/60Hz
> 8770-32: HIGH-PRESSURE HOSE, 5ft
> 8770-33: HIGH-PRESSURE HOSE, 10ft
> 8770-60: CHAMBER LID for 4" Process Chamber
> 8785: Double T-Filter Assembly
> 8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
> 8784-05: Gasket for LCO2 Tank Connect
> 8770-51T/815B: O-Ring for Autosamdri®-934 and Autosamdri®-815B
> 8770-46: Flow Meter - Use with any 2.5", 3.4" and 4.0" dia. Autosamdri® Chamber (60 SCFH)
> 8770-53: POWER CABLE
> 8770-54: LCO2 TANK SCALE W/ REMOTE DISPLAY
> 8770-56A: Step-Down Transformer, 200-240V → 110-120V, 3000W
> 8770-83A: Internal 0.5µm 316SS Particulate Line Filter
> 8768B: 4" - 100mm HF Compatible Wafer Holder Holds 5 Wafers
> 8768C: 3" - 75mm HF Compatible Wafer Holder Holds 5 Wafers
> 8768D: 2" - 50mm HF Compatible Wafer Holder Holds 5 Wafers
> 8768G: 1" - 25mm HF Compatible Wafer Holder Holds 5 Wafers
> 8768E: 10mm Square HF Compatible Chip Holder, Holds 5 Die
CPD MULTI-APPLICATIONS
> Gel
> Graphene
> MEMS
Tousimis CPD : Critical Point Dryer Can be drying a sample without damage through the patented stasis mode.
