나노비즈코리아

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• Process up to 6" (150mm) wafers 

• Automatic Supercritical Point Dryer 

• Minimal Facility Utility Requirements 

• Made in U.S.A. 

tousimis catalog# 8785C

FEATURES

> Clean room static-free compatible design.

> Microprocessor controller allows for complete automatic processing.*

> All internal surfaces are inert to CO2 and ultra pure alcohols.*

> Repeatable operating parameters insuring reproducibility of results.*

> LED's instantly indicate process mode at a glance.*

> Integrated temperature controls.*

> Processes up to 5 x 6" (150mm) diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4" (100mm), 5 x 3" (75mm), 5 x 2" (50mm) diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).

> All electronic components meet CE, UL and/or U.S. Military Specifications.

> Internal rupture disc built in for safety.*

> Static pressure control module pre-set for automatic safe pressure stability.

> An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.*

> For added safety and convenience, U.S. Patented SOTER™ Condenser* quietly captures exhaust and alcohols.

> Under-lit chamber with viewing window facilitates operator chamber status viewing.

> 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.*

> Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.

SPECIFICATIONS

> Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length

> System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.

> Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml

> Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi

> 120V/50-60Hz (Other voltage units also available. Please Inquire)

> LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*

STANDARD ACCESSORIES 

>  LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).

>  Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Automegasamdri®-915B.

>  New SOTER™ Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*

>  Static free Exhaust Tubing for all exhaust outlets.

>  Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.

>  Spare Chamber O-ring (3), Chamber Lamp (1), and 5A Slo-Blow Fuses (2).

>  4 Chamber Inserts.* Enables original chamber ID reduction down to smaller chamber ID sizes for a range including: 6", 4", 3", 2", and 1.25" !

>  6" (150mm), 4" (100mm), 3" (75mm), 2" (50mm) diameter Wafer Holders and 10mm square die holders included. Holders are HF compatible and can hold up to 5 wafers or die each.

>  Free lifetime technical support consultation by our scientific staff.

> 2 year warranty on all parts and labor.