나노비즈코리아

Freestanding Cantilever

Processed by Autosamdri®-815B, Series C
Quantum NanoFab, University of Waterloo (Mary Gopanchuk and Nathan Nelson-Fitzpatrick)

Freestanding Cantilever

Processed by Autosamdri®-815B, Series C
Quantum NanoFab, University of Waterloo (Mary Gopanchuk and Nathan Nelson-Fitzpatrick)

Released cantilevers after thermal annealing

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

Released cantilevers after thermal annealing

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

Thermal Actuated Actuators

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

Thermal Actuated Actuators

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

A flow sensor fabricated using the process flow

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

MEMS Shock Sensor

Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)

MEMS Shock Sensor (Multi-level)

Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)

MEMS Shock Sensor (Multi-Directional)

Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)

High aspect ratio silicon gratings

Processed by Autosamdri®-815B, Series B
Massachusetts Institute of Technology (Minseung Ahn)

High aspect ratio silicon gratings

Processed by Autosamdri®-815B, Series B
Massachusetts Institute of Technology (Minseung Ahn)

Solderfan

Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)

Rotary Microfan with Rotary Motor

Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)

Rotary Motor

Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)

Magnetic Resonance Force Microscope

Processed by Automegasamdri®-915B, Series B
Korea Research Institute of Standards and Science (KRISS), Korea (Jae-Hyuk Choi, Ph. D.)

SEM View of Coupled Oscillators Made of Low Stress Silicon Nitride. 300x

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

View of Single Coupled Oscillator Made Out of Low Stress Silicon Nitride. 800x

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

Array of low stress silicon nitride coupled oscillators with gold actuation leads. 1,100x

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

MEMS Based Resonant Device

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

Electrostatic Actuator

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

Resistive IR Emitter Device

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

ARTIFICIAL EYELID ACTUATOR

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

ARTIFICIAL EYELID ACTUATOR

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

ARTIFICIAL EYELID ACTUATOR

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

MEMS Electrostatic Comb Drive

Processed by Automegasamdri®-915B, Series B
MEMX, New Mexico, USA ()

MEMS Electrostatic Actuator

Processed by Automegasamdri®-915B, Series B
MEMX, New Mexico, USA ()

RF MEMS Device

Processed by Automegasamdri®-915B, Series B
Middle East Technical University, Turkey (Tayfun Akin)

RF MEMS Device

Processed by Automegasamdri®-915B, Series B
Middle East Technical University, Turkey (Tayfun Akin)

RF MEMS Capacitive Switch

Processed by Automegasamdri®-915B, Series B
NASA-Glenn Research Center/Communications Technology Division, USA (Tayfun Akin)

RF MEMS Capacitive Switch

Processed by Automegasamdri®-915B, Series B
NASA-Glenn Research Center/Communications Technology Division, USA (Tayfun Akin)

E-beam resist pattern quality after CPD Process

Processed by Autosamdri®-815B, Series C
NRL Nano Fab - Washingtopn, DC (Chul-Soo Kim)

E-beam resist pattern quality after CPD Process

Processed by Autosamdri®-815B, Series C
NRL Nano Fab - Washingtopn, DC (Chul-Soo Kim)

Silicon Microrobots - Elbow hinge

Processed by Autosamdri®-815B, Series B
University of California at Berkeley and Micropropulsion Corp. USA (Seth Hollar and Anita Flynn Daniel Jean, Ph.D.)

Silicon Microrobots - Leg of Robot

Processed by Autosamdri®-815B, Series B
University of California at Berkeley and Micropropulsion Corp. USA (Seth Hollar and Anita Flynn Daniel Jean, Ph.D.)

B Lock & Stepper

Processed by Automegasamdri®-915B, Series B
University of California at Los Angeles (Professor William Kaiser)

MEMSJet Drop Ejector

Processed by Automegasamdri®-915B, Series B
XEROX CORPORATION, USA (Joel A. Kubby)

Mechanical Cantilevers

Processed by Autosamdri®-815B, Series B
University of Edinburgh, UK (Stefan Enderling)

Tiltable Microplatform

Processed by Automegasamdri®-915B, Series B
University of Michigan at Ann Arbor, Department of Engineering (Yuan Xie, Ph.D.)

Resonator

Processed by Automegasamdri®-915B, Series B
VTT Technologies, Finland (Jyrki Kiihamaki, Senior Research Scientist)

A Sensor for Acoustic Emission

Processed by Automegasamdri®-915B, Series B
VTT Technologies, Finland (Jyrki Kiihamaki, Senior Research Scientist)