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VPI Coater

Magnetron Sputtering Coater (SD900M Model)
SD-900M은 더 나은 이미징을 위해 비전도성 또는 열에 민감한 SEM 샘플을 Au로 코팅하는 데 널리 사용됩니다. 또한 표면 처리에 탁월하며 기판 샘플의 손상을 방지합니다.

제품설명

                          Magnetron Sputtering Coater (SD900M Model)



 


Introduction


Materials Science Magnetron Ion Sputtering Coater (SD900M Model) is ideal and designed for lab SEM sample preparation.

It is widely used to coat non-conductive or heat-sensitive SEM samples with Au for better imaging. 


It is also excellent for surface treatment and avoids damage to the substrate sample.

Coating Result Sample Picture under SEM (by SD-900M Model) EPTFE (Extended Poly Tetra Fluoro Ethylene)


Materials Science Magnetron Ion Coating Coater


Low vacuum, can be achieved quickly when using proper vacuum pump within 5 minutes.

It generates much less heat and avoids plasma damage to the substrate sample.  It is user friendly and easy to operate.


Vacuum pump is included. Chiller is optional.



Technical Specification 


Vacuum pump set  (Oil required) rotary vacuum pump
Rotary pumping speed  50 Hz : 8 m³/h (2.2 L/s)/ 60 Hz : 9.6m³/h (2.6 L/s)
 Vacuum limit  2 Pa
Max sputtering current  100mA
Working pressure  20Pa - 8 Pa
Vacuuming time  <5 Min(2 Pa)
Vacuum measure  Measuring range from atmosphere to 2*10-2mbar
Chamber size  Φ150*120mm (height) scratch resistant quartz glass
Magnetron target source  Target size φ50*0.1mm(Au)/target source: Au,Ag,Pt
Operation method  Instruction Manual
Weight/size  45kg/360mm length x 300mm wide x 380mm high
Power supply  AC 110V 60Hz or AC 220V 50Hz
Power consumption  <1500W
Cooling method  Water cooling(optional)
Warranty  One year limited warranty with lifetime product support 


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02-923-3881
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