PRODUCTS
NanoBiz Korea
나노비즈코리아
VPI Coater
DC Or RF High Vacuum Magnetron Ion Sputtering Coating Coater
High Vacuum Magnetron Ion Sputtering Coater는 가장 안정적인 스퍼터링 환경을 제공하며 매우 짧은 시간 내에 마그네트론 스퍼터링의 기본 실험 조건을 달성합니다. DC/RF 2가지 스퍼터링 전원 옵션을 제공하여 시편에 도전성 또는 비전도성 물질을 스퍼터링할 수 있도록 하고 PVD(Physical Vapor Deposition) 성능을 향상시킵니다. 표면처리 및 코팅에도 탁월합니다. 작동하기 쉽고 사용자 친화적입니다.
제품설명
DC Or RF High Vacuum Magnetron Ion Sputtering Coating Coater
Introduction
High Vacuum Magnetron Ion Sputtering Coater is ideal and designed for materials science and sample preparation.
It is widely used for the majority of universities and scientific research institutes of materials science and engineering to coat, for metals, ceramics, semiconductors, insulators or other kinds of membrane material preparation.
High Vacuum Magnetron Ion Sputtering Coater provides the most stable sputtering environment and achieves the basic experimental conditions of magnetron sputtering in a very short period of time.
It provides DC / RF two kinds of sputtering power options which allow sputtering conductive or non-conductive substance on specimen and improves physical vapor deposition (PVD) Performance.
It is also excellent for surface treatment and coating. It is easy to operate and user friendly as well.
Vacuum pump and Chiller are included.
Technical Specification
| Vacuum pump set | (Oil required) rotary vacuum pump+(oil free) turbo moleculan pump set |
| Rotary pumping speed | 50 Hz : 16 m³/h (4.4 L/s)/ 60 Hz : 19.2 m³/h (5.2 L/s) |
| Molecular pumping speed | 300 L/s |
| Vacuum limit | 5* 10-5 Pa |
| Working pressure | 0.5-5 Pa |
| Vacuuming time | >10 Min(10-3Pa) |
| Vacuum measure | Measuring range from atmosphere to 1*10-6 Pa |
| Gas control | Gas flow controller |
| Chamber size | φ260*200mm (height) metal |
| Magnetron target source | Target size φ 50*3mm(Cu)/target source: weak magnetic substance /materials |
| Operation method | Instruction Manual |
| Weight/size | 100kg/610mm length x 420mm wide x 490mm high |
| Power supply | AC 110V 60Hz or AC 220V 50Hz |
| Power consumption | <3000W |
| Cooling method | Air cooling(pump)+ water cooling(sputtering target) |
| Warranty | One year limited warranty with lifetime product support |
