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VPI Coater

Magnetron Ion Sputtering & Therma Evaporationl Carbon Coater (SD900C Model) )
SD900C 모델(마그네트론 이온 스퍼터링 장치)은 더 나은 이미징을 위해 비전도성 또는 열에 민감한 SEM 샘플을 Au로 코팅하는 데 널리 사용됩니다. 또한 표면 처리에 탁월하며 기판 샘플의 손상을 방지합니다. 탄소 코팅기는 시료 표면에 얇은 전도성 탄소 필름을 도포합니다.

제품설명

Magnetron Ion Sputtering & Thermal Evaporation Carbon Coater (SD900C) 



Introduction


Magnetron Ion Sputtering Unit &Thermal Evaporation Carbon Coater is ideal and designed for lab SEM sample preparation. SD900C Model (Magnetron Ion Sputtering Unit) is widely used to coat non-conductive or heat-sensitive SEM samples with Au for better imaging. 


It is also excellent for surface treatment and avoids damage to the substrate sample.

SD900C Model (Thermal Evaporation Carbon Unit) carbon coater applies a thin conductive carbon film on a sample surface. 


Applying this coating to a non-conductive sample is an effective preparation technique for diminishing charge-up electron artifacts for analysis in a SEM.

Working vacuum pressure can be achieved quickly when using proper vacuum pump within 5 minutes. It is user friendly and easy to operate.


Vacuum pump is included.


Chiller is optional. (for Magnetron Ion Sputtering Unit)

 

 

Technical Specification    


Vacuum pump set

(Oil required) rotary vacuum pump

Rotary pumping speed

50 Hz : /h (2.2 L/s)/ 60 Hz : 9.6/h (2.6 L/s)

Vacuum limit

2Pa

Max sputtering current

100mA

Max evaporation current

100A

Working pressure

20Pa -8 Pa

Vacuuming time

<5 Min(Pa)

Vacuum measure

Measuring range from atmosphere to 2*10-2mbar

Gas control

Gas flow controller

Chamber size

Φ150*120mm (height) scratch resistant quartz glass

Magnetron target source

Target size φ 50*0.1mm(Au)/ target source: Au,Ag,Pt

Evaporation target source

Target material:carbon rope /target source:carbon rope

Operation method

Instruction Manual

(2 units)Weight/size

55kg/360mm length x 300mm wide 380mm high

Power supply

AC 110V 60Hz or AC 220V 50Hz

Power consumption

<2000W

Cooling method

Air cooling(Evaporation)+water cooling (sputtering )

Warranty

One year limited warranty with lifetime product support



전화문의
02-923-3881
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