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FEMTOTOOLS

FT-NMT04 In-Situ SEM NanoIndenter
FemtoTool’s FT-NMT04 nanomechanical tester is a flexible nanoindenter for in-situ SEM/FIB. The system can be used to accurately characterize material behavior down to the nanoscale.

The FT-NMT04 is the first ever nanoindenter to use MEMS, making use of FemtoTool’s novel MEMS technology. The nanoindenter is the result of twenty years of development breakthroughs and provides industry-leading repeatability, resolution and real-time response.

* Nanoindentation, compression- , tensile- , fracture- and fatigue testing

제품설명

Description 

FT-NMT04 Nanomechanical Testing System Brochure (PDF) 

FemtoTool’s FT-NMT04 nanomechanical tester is a flexible nanoindenter for in-situ SEM/FIB. The system can be used to accurately characterize material behavior down to the nanoscale.

As the world’s first MEMS-based nanoindenter, the FT-NMT04 is based on the patented FemtoTools Micro-Electro-Mechanical System (MEMS) technology. Leveraging over two decades of technology innovations, this in-situ nanoindenter features unmatched resolution, repeatability and dynamic response.

The FT-NMT04 in-situ nanoindenter is optimized for the mechanical testing of metals, ceramics, thin films as well as microstructures such as metamaterials and MEMS. Furthermore, through the use of various accessories, the capabilities of the FT-NMT04 can be extended to versatile requirements in various fields of research.

Typical applications include the quantification of plastic deformation mechanisms by compression testing of micropillars or the tensile testing of dog-bone specimens, thin films, or nanowires. 

Furthermore, continuous stiffness measurement during compression testing enables the quantification of the crack growth and fracture toughness during fracture testing of micro-beams. Due to the unmatched low noise floor of 500 pN and 50 pm respectively, the FT-NMT04 enables shallow nanoindentation with an unmatched repeatability as well as the unprecedented correlation of nanoindentation with EBSD mapping.

                                                              
                                                         

 

Function


Main Function


FT-NMT04 In-situ SEM nano indentation instrument can do nano indentation, micro column compression

test, micro cantilever fracture test, tensile test, stem / EBSD related In -situ Nano Mechanical test. 


Among them, nano indentation function can be used to measure the hardness and Young's modulus of low volume materials, quantify the contact mechanics and dynamic response, and characterize the deformation mechanism under multiaxial stress; microcolumn compression test function can be used to measure the critical shear stress of sliding system, characterize the deformation mechanism under uniaxial stress, quantify the extension damage and local strain; micro cantilever fracture test function can be used to The continuous J-integral of submicron fracture toughness, the characterization of monotonic cyclic fracture behavior, and the quantification of single crack generation and propagation were carried out. 


The micro tensile testing function can be used to measure yield stress, ultimate tensile stress and fracture elongation, characterize fracture under monotonic cyclic load, quantify local strain effect and crack growth; stem / EBSD related in-situ nano mechanical testing function can be used to quantify local strain, phase transformation, texture evolution and dislocation dynamics , grain boundary migration


                                                               
                         

   
Technical Features


● Nanoindentation, compression- , tensile- , fracture- and fatigue testing


● Patented MEMS-based sensing technology enables highest resolution and repeatability of force from 0.5 nN to 200 mN and displacement from 0.05 nm to 21 mm


● Ability to conduct continuous stiffness measurement (CSM) or fatigue testing up to 500 Hz without the need for complex, dynamic calibrations


● True displacement-controlled testing, enabling the quantification of fast stress-drops (optional force-feedback based force-controlled measurements are possible as well)


● 3, 4, or 5-Axis (x, y, z, rotation, tilt), closed-loop sensor to sample alignment using position encoders on all axes


● Elevated temperature testing up to 400°C


● Ability to sequentially orient the sample towards the nanoindenter tip, the electron-beam and the EBSD detector to evaluate hardness in specific grains and locations (only with the 5-axis configuration)


● Simple determination of the indenter area function and frame compliance


● Powerful data analysis tool to evaluate measurement results and apply fits or functions to calculate material properties


● SEM sample stage mount enables fast installation and removal of the system inside the SEM chamber


● Compact, modular design enables the integration into almost any SEM


● Customizable measurement procedures and principles


Technological capability


Force Sensing

- Maximum force: 200 mN

 - Force noise floor: 0.5 nN (at 10 Hz)

 - Measurement frequency up to 96 kHz


Displacement Sensing (coarse)

 - Displacement range: 21 mm

 - Displacement noise floor: 1 nm (at 10 Hz)

 - Measurement frequency: 50 Hz


Displacement Sensing (fine)


- Displacement range: 25 μm

 - Displacement noise floor: 0.05 nm (at 10 Hz)

 - Measurement frequency up to 96 kHz


3, 4 and 5-axis force sensor to sample alignment


 - X, Y, Z closed-loop positioning range: 21mm x 12mm x 12 mm

 - X, Y, Z closed-loop positioning noise floor: 1 nm

- Sample tilt range: 90° (FT-NMT04-XYZ-RT)

- Sample rotation range: 360° (FT-NMT04-XYZ-R), 180° (FT-NMT04-XYZ-RT)

 - Sample  angular noise floor: 35 micro-deg


Application


NanoIndentation


 Determination of hardness and Young’s Modulus in low volumes


• Quantification of contact mechanics and dynamic response


• Characterization of deformation mechanisms under multiaxial stress


While standard nanoindentation provides measurement data at the onset of unloading, using Continous Stiffness Measurement (CSM) enables to record both hardness and elastic modulus as a function of the indenter penetration depth. 


With high load and displacement resolutions, CSM nanoindentation with FT-NMT04 enables to quantify the evolution of the mechanical response from shallow penetration depths and the onset of plasticity, to the bulk material. 


Furthermore, the extended harmonic frequency range of the FT-NMT04 system (up to 500Hz with very little contribution from the measurement system), combined with a fast data acquisition rate will enable the unprecedented quantitative dynamic mechanical analysis of the viscoelastic and viscoplastic behavior of materials.


                                                                      



Micropillar Compression


 Determination of sub-micron fracture toughness with continuous J-integral method

• Characterization of monotonic and cyclic fracture behavior

• Quantification of individual crack initiation and propagation events


In-situ SEM micro-pillar compression tests provide a way to measure the uniaxial mechanical response of low volumes of materials and to directly correlate the stress-strain data to individual deformation events. It enables to quantify specific phases and particles or to study size effects, in terms of deformation behavior and strengthening mechanisms.





Micro-Cantilever Fracture Testing


• Determination of sub-micron fracture toughness with continuous J-integral method

• Characterization of monotonic and cyclic fracture behavior

• Quantification of individual crack initiation and propagation events


In-situ SEM micro-cantilever bending tests provide new insights into the micromechanism of fracture by combining the stress-strain data with direct crack path observation. 


The typical micro-cantilever bending test uses compression loading of a free-standing notched cantilever beams, prepared with lithography or Focused Ion Beam (FIB).









Micro-Tensile Testing


 Determination of yield stress, ultimate tensile stress and elongation to fracture

• Characterization of fracture modes under monotonic and cyclic loading

• Quantification of strain localization effect and crack initiation and propagation events


For sample preparation, focused-ion beam (FIB) can be used to create dog-bone shaped samples with a uniform cross-section that remain attached to the original substrate. FIB can also be used to machine a griper shape into the tip of the silicon force-sensing probe. This gripper shape enables the interlocking with the dog bone sample in order to conduct micro-tensile tests.







Correlate Mechanical Testing with STEM/EBSD


 Quantitative study of strain localization

• Quantitative study of phase transformations

• Quantitative study of texture evolution

• Quantitative study of dislocation dynamics

• Quantitative study of grain boundary migration


The FT-NMT04 is specially-designed to combine the study of the stress-strain response of materials not only with the observation of surface events, but also with EBSD, TKD and STEM characterization to gain unprecedented quantitative insight into phase transformation and dislocation dynamics. 


Micro-tensile testing, pillar compression and cantilever bending in correlation with EBSD enable to monitor and quantify dynamic phase transformations and strain localization.


                          





 



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