Attolight’s Quantitative CL-SEMs offer “No Compromise” large field fast scanning simultaneous acquisition of SEM image, hyperspectral CL maps, and optical spectra.
Smaller diameter wafers, or miscellaneously shaped substrates are manually loaded on intermediary 300mm susceptors subsequently handled automatically by the tool.
The Santis 300 system offers 3 distinct acquisition modes: step and repeat (S&R), continuous scanning mode (AWpix), integrative scanning mode (FWbrush)
- up to 300 mm wafer tool
- High CL-SEM throughput
- Simultaneous SEM imaging and Optical signature acquisition
- Edge detection for accurate wafer positioning (better than 10µm)
- Automated wafer bow mapping and correction