High efficiency EDS Analysis at FEI Quad SDD
Double tilt ±20＋Vacuum transfer
High resolution tilt control at 0.01degree step
Structure that does not obstruct detection
path of EDS as much as possible
Vacuum retention capacity and blocking capacity indicated by data
It is proved that the vacuum arrival time is the same in the state where the Cradle is exposed
and the state where the atmosphere is stored and it is proved that the seal performance is
high because it leaks considerably when released to the atmosphere.
|Component||: Double-tilt and VacuumTransfer|
|X tilt||: ±25°|
|Y tilt / Min step||: ±20°/ 0.01°|
|Sample set||: Smart Set System|
JEOL PP type HR/FHP/UHR
Software, Safety Operation Stand of tem holder introduce.