나노비즈코리아

PRODUCTS

NanoBiz Korea

agar scientific

Manual Sputter Coater

An easy-to-use basic sputter coater for gold coating of SEM specimens.

List

제품설명

This is a easy-to-use basic instrument for gold coating of SEM specimens. It has fully variable current control, a digital process timer with pause option, a variable height specimen table, a hinged top plate and an O-ring sealed vacuum chamber.

The control allows the sputter current to be set independently of the gas pressure, which is adjusted separately by a manual leak valve. Coverage and grain size are optimised for any specimen. The cool magnetron type head with 57mm diameter target gives efficient sputtering with minimal heating.

Coating time is set by a timer with a digital readout and stored in the memory. The vacuum status and sputter current are displayed on the panel meter.

A modular desktop design combines sputter control unit, pumping system and thickness monitor into an area of only 400 x 600mm.

It is fully integrated using a quick release all-metal coupling system. The adjustable height specimen table will accept up to 12 pin type stubs or can be used as a platform for other types of stubs and specimens. A vacuum feed through is provided for the optional film thickness monitor.

Chamber size: 120 x 120mm

제품	제품 코드번호
Agar Sputter Coater- Manual	AGB7340
Pumping System for Coater	AGB7366
Manual Film Thickness Monitor	AGB7348

Technical Data

Specification
Chamber size	120mm Ø x 120mm high (4.75" x 4.75")
Sputter head	Low voltage planar magnatron
	Quick target change
	Wrap-around dark-space shield
Sputter target	Gold fitted as standard (Au/Pd or Pt optional)
	57mm Ø x 0.1mm thick
Sputter supply	Microprocessor based
	Safety interlocked
	Current control independent of vacuum
	Variable 10 - 40mA
Sample table	Holds 12 SEM ½" stubs
	Height adjustment through 60mm
Analogue metering	Vacuum, Atm - 0.001mb
	Current, 0 - 50mA
Control method	Manual gas and current control
	Digital timer, 5 - 300 seconds with pause
	Manual vent
Dimensions	W 420mm (16.5"), D 295mm (11.6"), H 287mm (11.3")
Weight	10Kg (22.1 lbs)
Power	40VA max (excluding rotary pump)
Pumping system
Rotary Pump	High speed, direct drive 2-stage
Pumping speed	2.5/3.0m³/hr (50/60Hz)
	Pumpdown time to 0.1mb is 30/25 sec.
Desktop system	Vacuum pump is mounted on desktop compatible anti-vibration table
	All metal vacuum coupling system
Dimensions	W 330mm (13.0"), D 215mm (8.5"),
	H 210mm (8.3"), 270mm (10.6") with filter
Weight	15Kg (33.2 lbs)
Power	130VA
Services required
Supply	100 - 120 or 200 - 240 VAC, 50/60Hz
	(specify on order)
Power	170VA max.
Argon gas	Purity, min. 99.9%
	Pressure, regulated 7 - 8 psi (0.5 - 0.6 bar)
	Hose connection, 6.0mm (¼")

나노비즈코리아

주메뉴

agar scientific

제품설명

하단영역